发明名称 CHARGED PARTICLE BEAM DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a highly reliable electron gun capable of preventing poor insulation on a high-voltage connection section. SOLUTION: Electric field concentration can be relieved by preparing a conductor shield 27 so as to be firmly adhered to the outside of insulating resin 25 of a connection bushing 11. A potential difference between a metal section 23 of a power-receiving section and the connection bushing 11 can be made uniform with the conductor shield 27. The electric field concentration of the connection section 26 of the power-receiving section can be considerably relieved as the conductor shield 27 is further extended to a power-receiving side flange terminal 22 side rather than the connection section 26 of the power-receiving section, namely, up to a position opposite to an insulator section 24 of the power-receiving section. Consequently, the electric field concentration to a space of the high-voltage connection section can be prevented, and discharge can be prevented. Therefore, insulating resistance of the high voltage connecting section can be maintained even in case its creepage distance is not extended or insulating fluid or insulating gas made of fluorine as a major component is not filled up. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009048810(A) 申请公布日期 2009.03.05
申请号 JP20070212024 申请日期 2007.08.16
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 KOBAYASHI DAISUKE;IKEGAMI AKIRA;FUKUHARA SATORU;AKATSU MASAHIRO;MURAKOSHI HISAYA;MORI JUN
分类号 H01J37/248 主分类号 H01J37/248
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