| 摘要 |
PROBLEM TO BE SOLVED: To easily fix a cover covering a floor surface and simply cover an end part of a base plate as a base of a rail, and to suppress fling-up of particles caused by travelling of the track carriage system. SOLUTION: A mounting plate 14 is attached by using a groove 9 at a bottom part of a travel rail 8 of the track carriage system in a clean room, and a floor cover 12 with a plurality of holes 24 is attached to the mounting plate 14. A whole upper face of the floor cover 12 is provided with small-diameter holes 24 to suck air in the clean room from a waffle 4. COPYRIGHT: (C)2009,JPO&INPIT
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