发明名称 METHOD FOR REDUCING DISLOCATION THREADING USING A SUPPRESSION IMPLANT
摘要 The present invention provides a method for manufacturing a semiconductor device. In one embodiment, the method for manufacturing the semiconductor device includes a method for manufacturing a zener diode, including among others, forming a doped well (240) within a substrate (210) and forming a suppression implant (420) within the substrate (210). The method for manufacturing the zener diode may further include forming a cathode (620) and an anode (520) within the substrate (210), wherein the suppression implant (420) is located proximate the doped well (240) and configured to reduce threading dislocations.
申请公布号 US2009061606(A1) 申请公布日期 2009.03.05
申请号 US20080267216 申请日期 2008.11.07
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 MOLLAT MARTIN;CHATTERJEE TATHAGATA;EDWARDS HENRY L.;ROBERTSON LANCE S.;IRWIN RICHARD B.;HU BINGHUA
分类号 H01L21/265 主分类号 H01L21/265
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