ELEMENT ASSEMBLY, AND ITS MANUFACTURING METHOD

摘要

In the upper face of a substrate (22), there are formed a plurality of recesses (25). In one recess, a variable condenser (27) is formed by mounting a plate-shaped stationary electrode (30) on the bottom face of the recess (25) and by mounting a plate-shaped movable electrode (31) in a confronting manner on the back of a cover (23). In another recess, a stationary electrode (33) is mounted on the bottom of the recess (25), and a moving electrode (34) is mounted in a confronting manner on the back of the cover (23), so that a high resistor (35) is formed between the two electrodes, thereby to form a variable resistor (28). In still another recess, a variable inductor (29) is formed by mounting a plate-shaped stationary electrode (36) on the bottom of the recess (25) and by mounting a zigzag-meandering movable electrode (37) in a confronting manner on the back of the cover (23).