| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To suppress the vibration of an article to be conveyed by a simple constitution adapted to a small space in a conveying vehicle for conveying, for example, various kinds of substrates for manufacturing a semiconductor device on a track. <P>SOLUTION: The conveying vehicle (11) is provided with a traveling roller (12) rolling on guide rails (2) laid at both sides of the track along the track in which one rail is interrupted at a position where the track is merged or branched; a conveying vehicle body (11a) rollingly mounted with the traveling roller; an attitude retaining roller (13) provided at a position opposed to a roller receiver (21) laid along the track above a conveying vehicle body and provided at a position where at least they are merged or branched, and suppressing an inclination of the conveying vehicle body on the guide rail by contacting with the roller receiver. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
