| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid-state image pickup device in which the fusion of adjacent filter layers is prevented to eliminate the lowering of the device characteristics of the solid-state image pickup device such as variations in the thickness of a color filter or in the size of each filter layer, lowering of the sensitivity, color mixture and impairment of the sensitivity ratio. SOLUTION: In the case where a color filter with filter layers formed in a land shape in patterns different from color to color is patterning-formed on a substrate P using masks GM, BM, RM, WM of unit color filter patterns different from color to color, when a land-shaped filter layer G of a first color is patterning-formed using a mask GM of a unit color filter pattern GP corresponding to the filter layer G and then land-shaped filter layers B, R of second and the subsequent colors are formed between filter layers G of the first color, masks BM, RM for the second and the subsequent colors are formed with mask apertures 5 in shapes different from the land shape of each filter layer B, R of the unit color filter patterns BP, RP for the colors. COPYRIGHT: (C)2009,JPO&INPIT
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