| 摘要 |
PROBLEM TO BE SOLVED: To block a slit formed in a vertical direction of a plate so as to insert a member for connecting a cover attaching/detaching tool of a cover attaching/detaching device arranged in the inside of a frame of a manufacturing apparatus to a lifting apparatus of the cover attaching/detaching device, which is arranged on the outside of the frame, in a load port apparatus provided with the cover attaching/detaching device of a carrier cassette. SOLUTION: In the load port apparatus, a first blocking tool 10 wherein a blocking tape 12 is wound in a case 11 in a state energized in a winding direction is attached to either one of a lower formation end part S<SB>1</SB>of the slit S, and a base body 42 of a horizontal moving device 40 and the end part of the drawn-out blocking tape 12 is attached to the other one in the outside of the frame F, and a second blocking tool 20 is attached to either one of an upper formation end part S<SB>2</SB>of the slit S, and a first coupling member 41 of the horizontal moving device 40, and the end part of a blocking tape 22 of the second blocking tool 20 is attached to the other on the inside of the frame F. COPYRIGHT: (C)2009,JPO&INPIT
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