摘要 |
PROBLEM TO BE SOLVED: To provide a storage element which can be improved simultaneously in a plurality of characteristics in a trade-off relation in the composition ratio regulation of one element in an ion source layer. SOLUTION: A lower electrode 11, a high-resistance layer 12, the ion source layer 13 and an upper electrode 14 are arranged in this order. The ion source layer 13 has two layers of a first ion source layer 13A provided on the high-resistance layer 12 side, and a second ion source layer 13B provided on the upper electrode 14 side. The first ion source layer 13A contains at least Zr. The second ion source layer 13B contains at least one metal element of Cu, Ag and Zn, and at least one chalcogen element of Te, S and Se. COPYRIGHT: (C)2009,JPO&INPIT
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