| 摘要 |
PROBLEM TO BE SOLVED: To provide a sealing method of a package and an apparatus thereof, which actualizes high reliability sealing by uniform heat transfer from a heating tool to a lid. SOLUTION: The sealing method of the package mounts a lid in the opening portion of a surrounding appliance housing electronic components, and melts a wax material interposed between the surrounding appliance and the lid by applying heat to seal the opening. A lid 1 in which the wax material 2 is provided in the region corresponding at least to the periphery of the opening of the surrounding appliance 6 of the face opposed to the surrounding appliance 6 is prepared, the not-opposed face to the surrounding appliance 6 of this lid 1 is vacuum held by a heating tool 3, the temperature of the heating tool 3 is raised to melt the wax material 2, the periphery of the opening portion of the surrounding appliance 6 and the melted wax material 2 provided in the lid 1 are contacted, and then the wax material 2 is solidified while maintaining the vacuum holding. COPYRIGHT: (C)2009,JPO&INPIT
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