| 摘要 |
PROBLEM TO BE SOLVED: To provide a device capable of shortening time required to mount conductive balls to one substrate. SOLUTION: This filling device 10 has a holder 130 for holding a mask 110 on a substrate 100, a plurality of heads 141 provided along the X direction, and a moving device 150 for moving a plurality of the heads 141 in the Y direction. The mask 110 held by the holder 130 includes a plurality of mask patterns forming an arrangement of a plurality of openings. A plurality of the mask patterns corresponds to a plurality of the electrode patterns of the substrate. The mask 110 held by the holder 130 also includes a plurality of groove-shaped first recessed parts 121 extending in the Y direction in parallel with its top face 110a. Each recessed part 121 has a depth at least corresponding to the radius of the conductive ball. COPYRIGHT: (C)2009,JPO&INPIT
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