摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray generator suppressing the effect of a variation in voltage on the formation of a focus of an electron beam, even when a grid electrode is set to the ground potential. SOLUTION: The X-ray generator includes a cathode electrode 15, a grid electrode 17, a focus electrode 18, an X-ray tube provided with an anode target 14 emitting X rays, a tubular voltage generator 19 generating a tubular voltage to be applied to the anode target, a focus voltage generating section 23 generating a focus voltage to be applied to the focus electrode, a bias voltage generating section 20 generating a bias voltage to be impressed between the cathode electrode and the grid electrode, and a voltage divider generating a cathode voltage to be divided from the focus voltage and synthesizing the cathode voltage with the bias voltage generated by the bias voltage generator 20 so as to apply the resulting voltage to the cathode electrode 15. COPYRIGHT: (C)2009,JPO&INPIT
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