| 摘要 |
PROBLEM TO BE SOLVED: To prevent a substrate from being heated and deformed even if the power of a lamp is increased, by using, as a light source, a lamp which radiates little light with a wavelength of 300 nm or less. SOLUTION: The discharge lamp 11 is a short ark type ultrahigh pressure mercury lamp in which a pair of electrodes are disposed opposite each other within a discharge container, 0.08 to 0.30 mg/mm<SP>3</SP>mercury, rare gas, and halogen are sealed into the discharge container, and a distance between the electrodes is 0.5 to 2.0 mm. It contains many light components with a wavelength of 300 to 400 nm but contains few light components with a wavelength of 300 nm or less. The discharge lamp 11 is disposed so that a straight line connecting the pair of electrodes extends along the optical axis of a reflector 12 that has a reflecting face with a paraboloid revolution. Light radiated from the lamp 11 is changed into parallel light by the reflector 12. Some of the parallel light is directly emitted from a light emission port 14a and some of it is reflected by a mirror 13 and emitted from the light emission port 14a. A thin light emitting area IA is formed in the surface of a substrate 5. COPYRIGHT: (C)2009,JPO&INPIT
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