发明名称 TRANSFER APPARATUS
摘要 A transfer apparatus includes a first magnetic member placed in a carrier, and a second magnetic member placed in a carrier supporting unit to oppose the first magnetic member from a position below the first magnetic member in the vertical direction, and having the same polarity as that of the first magnetic member. The repulsive force generated between the first and second magnetic members vertically pulls up the carrier, thereby reducing the weight of the carrier supported by the carrier supporting unit.
申请公布号 US2009056878(A1) 申请公布日期 2009.03.05
申请号 US20080194951 申请日期 2008.08.20
申请人 CANON ANELVA CORPORATION 发明人 NOZAWA NAOYUKI;SONE HIROSHI;HITOMI SATOSHI;HASEGAWA YOSHIRO
分类号 H01L21/306 主分类号 H01L21/306
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