INSPECTION SYSTEM USING BACK SIDE ILLUMINATED LINEAR SENSOR
摘要
An improved inspection system using back-side illuminated linear sensing for propagating charge through a sensor is provided. Focusing optics may be used with a back side illuminated linear sensor to inspect specimens, the back side illuminated linear sensor operating to advance an accumulated charge from one side of each pixel to the other side. The design comprises controlling voltage profiles across pixel gates from one side to the other side in order to advance charge between to a charge accumulation region. Controlling voltage profiles comprises attaching a continuous polysilicon gate across each pixel within a back side illuminated linear sensor array. Polysilicon gates and voltages applied thereto enable efficient electron advancement using a controlled voltage profile.
申请公布号
WO2008153770(A3)
申请公布日期
2009.03.05
申请号
WO2008US06654
申请日期
2008.05.23
申请人
KLA-TENCOR TECHNOLOGIES CORPORATION;ARMSTRONG, J., JOSEPH;CHUANG, YUNG-HO;BROWN, DAVID, LEE
发明人
ARMSTRONG, J., JOSEPH;CHUANG, YUNG-HO;BROWN, DAVID, LEE