THIN FILM PIEZOELECTRIC TRANSFORMER AND MANUFACTURING METHOD THEREOF

摘要

A thin film piezoelectric transformer capable of performing simple support structure and sealing at the same time, and a manufacturing method thereof are provided to improve impact resistance by a beam structure integrated with an outer circumference part of a silicon diaphragm. A thin film piezoelectric transformer includes a piezoelectric vibrator(1) and a support structure. The support structure supports the piezoelectric vibrator, and includes an outer circumference part(3) and a beam part(2). The outer circumference part is arranged around the piezoelectric vibrator. A hollow is formed inside the outer circumference part. The beam part is extended from the outer circumference part to a hollow region. The piezoelectric vibrator is arranged in the hollow region, and is supported by the beam part. The outer circumference part and the beam part are made of silicone material.