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发明名称
METHODS AND SYSTEMS FOR SELECTIVELY DEPOSITING SI-CONTAINING FILMS USING CHLOROPOLYSILANES
摘要
申请公布号
EP2030227(A2)
申请公布日期
2009.03.04
申请号
EP20070797848
申请日期
2007.05.29
申请人
ASM AMERICA, INC.
发明人
TOMASINI, PIERRE;WEN, JIANQING;BERTRAM, RONALD;ARENA, CHANTAL;BAUER, MATTHIAS;CODY, NYLES
分类号
H01L21/31;C23C16/42;H01L21/331
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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