| 摘要 |
An air knife apparatus for the drying substrate is provided to discharge the air to the various angle and to remove the residual cleaning solution and the moisture in the surface of substrate. The mounting plate(10) comprises a plurality of air inlet ports. The first, the second and third slits(20,30,40) are combined with the knife body. The first, the second and the third air charge groove are formed in the mounting plate and the first, and the combining fitting of the second and the third slit. The air flowed in through the air inlet ports is delivered to the air charge groove of the second and the third slit with a plurality of air motion grooves. The discharge groove of the longitudinal direction has the gap of 0.15 mm±0.05. The air is discharged from the air charge groove through the gap.
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