| 摘要 |
PROBLEM TO BE SOLVED: To provide a material arrangement method, a film deposition apparatus, an electronic device, an electro-optic apparatus and electronic equipment in which defective discharge of a nozzle is rapidly detected, defective products are reduced, and the material discharging state is consistent. SOLUTION: The film deposition apparatus comprises a pressure control system 12 to perform the low-pressure control of the pressure in a vacuum chamber (a treatment chamber) 11, at least one nozzle 15 to arrange a material on a substrate (a member) 14, and a substrate stage 13 to hold the substrate 14, and further comprises a driving system (a moving means) 17 to relatively move the position of the nozzle 15 or the substrate stage 13, and an inspection system (an inspection means) to inspect the material arranged on the substrate 14. COPYRIGHT: (C)2006,JPO&NCIPI |
