WET CLEAN PROCESS FOR RECOVERY OF ANODIZED CHAMBER PARTS

摘要

A wet clean process for recovery of anodized chamber parts is provided to re-polish the chamber component having non-solved remnant by using a plasma process. The anodized aluminum part is put within solvent(86). The fluoric acid like aluminum fluoride is mixed within solvent. The aluminum fluoride is transformed to the soluble fluoro. The anodized aluminum part is rinsed in the water(88). The anodized aluminum part is dipped within the mixed deionized water of the high temperature. The washed pores of the anodization is released(90).