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发明名称
Technik zum Verringern der Lackvergiftung bei der Herstellung einer Metallisierungsschicht mit einem Dielektrikum mit kleinem epsilon
摘要
申请公布号
DE10260615(B4)
申请公布日期
2009.01.29
申请号
DE20021060615
申请日期
2002.12.23
申请人
ADVANCED MICRO DEVICES INC.
发明人
WERNER, THOMAS;RUELKE, HARTMUT;STRECK, CHRISTOF
分类号
H01L21/768;G03F7/00;G03F7/09
主分类号
H01L21/768
代理机构
代理人
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