| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a crystal vibrator which can be made small-sized and thin. <P>SOLUTION: The invention includes: a step of providing a package wafer including a plurality of internal and external connection terminals having upper and lower ends exposed on upper and lower surfaces, respectively; a step of forming a height regulating member at the top end of the internal and external connection terminals and joining one end of a crystal piece having an excitation electrode on the height regulating member; a step of laying a lower surface of a cap wafer having a cavity opened in its lower portion onto an upper surface of the package wafer provided with the crystal piece so as to make anode bonding; and a step of cutting along the portion of junction of the package wafer and the cap wafer and providing a plurality of crystal vibrator separated from each other. According to the invention, the thickness and the size of a product can be reduced to make the product small-sized and thin, which leads to an easy mass production, enabling the package to be manufactured with a batch process. Thus, the process lead time and the process efficiency can be improved. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
