| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum treatment system that reduces the temperature distribution difference caused between objects to be treated before each of them is vacuum treated. SOLUTION: While an object to be treated 107 is vacuum treated in a first treatment chamber 101, the object to be treated 107 subsequent to the first one is heated at a carrying-in entrance portion 108 of a second treatment chamber 102. The object to be treated 107 after being vacuum treated is carried to a carrying-out exit portion 109 of the second treatment chamber 102. Then, the carrying-in entrance portion 108 and carrying-out exit portion 109 are moved to a carrying-in direction and to a direction Y perpendicular to a carrying-in direction X of the object to be treated 107 by a carrying portion 202, so that the object to be treated 107 supported by the carrying-in entrance portion 108 is carried to the vacuum chamber 101. While the object to be treated is vacuum treated, a new object to be treated 107 is supported by a carrying-in entrance portion 104 and the object to be treated 107 supported by the carrying-out exit portion 109 is taken out of a second vacuum chamber 102, so that the new object to be treated 107 is preheated. COPYRIGHT: (C)2009,JPO&INPIT
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