| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical scanner, which suppresses the camber of a mirror part without changing the resonance frequency of a swinging mirror part of the optical scanner. SOLUTION: The method for manufacturing the optical scanner 10 comprising the mirror part 1, a beam part 2 supporting the mirror part 1 in a swingable manner, and a frame part 3 holding the beam part 2, includes a film forming process for depositing a reflective film 6 on the surface of the mirror part 1, and an ion implantation process for injecting an ionized material into the surface of the mirror part 1 by an ion implantation method to reduce the surface camber of the mirror part 1. COPYRIGHT: (C)2009,JPO&INPIT
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