| 摘要 |
PROBLEM TO BE SOLVED: To remove a cooling panel and a refrigerator with a trap container disposed between a vacuum treatment device and a main exhaust pump held as it is. SOLUTION: In this cryotrap 1, a cooling unit having the cooling panel for condensating and discharging at least a gas and the refrigerator 2 for cooling the cooling panel 6 is supported on a trap container 7, and joined to the vacuum treatment device and the main exhaust pump through the trap container 7. The cooling panel portion of the cooling unit is inserted into a connection pipe through the opening 13 of the trap container 7. Consequently, the cooling unit can be separated with the trap container 7 connected between the vacuum treatment device and the main exhaust pump held as it is. COPYRIGHT: (C)2009,JPO&INPIT
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