ARRAY OF ELECTROMAGNETIC RADIATION SENSORS WITH ON-CHIP PROCESSING CIRCUITRY

摘要

A system (100) comprises an illumination system (104) to illuminate a sensor device (12) with a reference beam (106) of electromagnetic radiation and with electromagnetic radiation (108) from a subject (9). A Doppler shift of the radiation from the subject (9) occurs, if the subject (9) is moving, vibrating, or is a flowing fluid. The sensor device (12) provides an array of electromagnetic radiation sensors and has processing circuitry integrated into the sensor device to process the output of the sensors to provide the output of the sensor device. The processing circuitry is operable to provide, for each operative sensor, a value calculated from the Doppler shift of the radiation from the subject (9) at the corresponding position at the subject (9), and to provide the calculated values as the processed output (102). This reduces the data rate required at the output of the sensor device, and allows the output to be used to form an image on a display (105) representing the movement, vibration or flow of the subject.