| 摘要 |
PROBLEM TO BE SOLVED: To provide an on-substrate structure which is easy to manufacture to form a bridge structure floating on a silicon substrate and is less likely to be damaged when manufactured, and to provide a method of manufacturing the same. SOLUTION: The on-substrate structure is designed in a shape continuously varying in width and etching processing is performed thereupon. The silicon substrate is separated from the on-substrate structure in order from a narrow-width place, so damage is less likely to be caused during the manufacture, as compared with the case where the silicon substrate is separated at a time. COPYRIGHT: (C)2009,JPO&INPIT |
