| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration detector capable of appropriately detecting a plurality of objects to be measured at the same position. SOLUTION: When control by a servo amplifier 21 is switched to ON by a switching part 24, acceleration of a coil bobbin 3 is measured based on detection of a current value flowing to a force coil 2b by a current value detection part 22. In addition, when the control by the serve amplifier 21 is switched to OFF by the switching part 24, induced electromotive force induced on a magneto coil 4 is detected by an induced electromotive force detection part 23, and speed of the coil bobbin 3 is measured based on the induced electromotive force which has been detected. COPYRIGHT: (C)2009,JPO&INPIT
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