发明名称 |
INTENSITY MODULATED ELECTRON BEAM AND APPLICATION TO ELECTRON BEAM BLANKER |
摘要 |
Method and apparatus for achieving an intensity modulated electron blanker are disclosed. An apparatus includes a cathode exposed to an activation source to generate an electron beam. Cathode control circuitry adjusts a cathode control amplifier to regulate cathode voltage and the potential of the electron beam. In some approaches the electron beam potential is used to control the blanking frequency, switching speeds, and duty cycle. In another approach electron generating beams directed on to the cathode are modulated to control the electron beam.
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申请公布号 |
US2009026912(A1) |
申请公布日期 |
2009.01.29 |
申请号 |
US20070829034 |
申请日期 |
2007.07.26 |
申请人 |
KLA-TENCOR TECHNOLOGIES CORPORATION |
发明人 |
LORDI VINCENZO;ROUGH KIRKWOOD;LIU XUEFENG;LEVI SHEM-TOV |
分类号 |
H01J37/302;H01J29/51;H01J37/30 |
主分类号 |
H01J37/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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