| 摘要 |
A vacuum transfer apparatus including an auxiliary vacuum chamber and a main vacuum chamber is used for transferring an uneven pattern to a disk substrate with a stamper. The auxiliary vacuum chamber is vacuumized or opened to air because the disk substrate is conveyed to and from the vacuum transfer apparatus through the auxiliary vacuum chamber. The disk substrate conveyed to the auxiliary vacuum chamber and then to the main vacuum chamber after the auxiliary vacuum chamber is vacuumized. In the main vacuum chamber, transferring of the uneven pattern with the stamper, curing of UV-curable resin, and removal of the stamper are performed to provide a disk substrate with the uneven pattern. Then, the disk substrate is conveyed from the vacuum transfer apparatus through the auxiliary vacuum chamber. An operation at the auxiliary-vacuum-chamber side and an operation at the main-vacuum-chamber side are performed in parallel.
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