发明名称 |
MAGNETIC DEFLECTOR FOR AN ELECTRON COLUMN |
摘要 |
The present invention relates, in general, to a deflector for microcolumns for generating electron beams, and, more particularly, to a deflector capable of scanning or shifting electron beams or functioning as a stigmator using a magnetic field. The deflector (100) according to the present invention includes one or more deflector electrodes. Each of the deflector electrodes includes a core (12) made of a conductor or a semiconductor, and a coil (11) wound around the core (12). |
申请公布号 |
WO2008140273(A3) |
申请公布日期 |
2009.01.29 |
申请号 |
WO2008KR02713 |
申请日期 |
2008.05.15 |
申请人 |
CEBT CO. LTD.;KIM, HO SEOB;KIM, YOUNG CHUL |
发明人 |
KIM, HO SEOB;KIM, YOUNG CHUL |
分类号 |
H01J37/147 |
主分类号 |
H01J37/147 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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