| 发明名称 |
METHOD FOR FIXING METAL NANOPARTICLE |
| 摘要 |
<p>A solution containing polymer-bound metal nanoparticles is deposited onto a substrate, at least the surface of which is insulating, to form a pattern, the substrate is dried, and then the pattern is subjected to plasma exposure.</p> |
| 申请公布号 |
EP2019082(A1) |
申请公布日期 |
2009.01.28 |
| 申请号 |
EP20070739162 |
申请日期 |
2007.03.20 |
| 申请人 |
JAPAN SCIENCE AND TECHNOLOGY AGENCY;OSAKA UNIVERSITY |
发明人 |
OJIMA, KAORU;TAKAGI, AKIHIKO;YAMADA, FUMIHIKO;MATSUMOTO, TAKUYA;KAWAI, TOMOJI |
| 分类号 |
B82B3/00;B22F1/00;C23C26/00;H01L29/06 |
主分类号 |
B82B3/00 |
| 代理机构 |
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