TEXTURED-GRAIN-POWDER METALLURGY TANTALUM SPUTTER TARGET

摘要

The sputter target includes a tantalum body having tantalum grains formed from consolidating tantalum powder and a sputter face. The sputter face has an atom transport direction for transporting tantalum atoms away from the sputter face for coating a substrate. The tantalum grains have at least a 40 percent ( 222 ) direction orientation ratio and less than a 15 percent ( 110 ) direction orientation ratio in an atom transport direction away from the sputter face for increasing sputtering uniformity, the tantalum body being free of ( 200 )-( 222 ) direction banding detectable by Electron Back-Scattering Diffraction and wherein the sputter target has a purity of at least 99.99 (%) percent.