PRESSURE SENSOR, DIFFERENTIAL PRESSURE TYPE FLOW METER, AND FLOW CONTROLLER

摘要

PROBLEM TO BE SOLVED: To provide a pressure sensor of a structure capable of preventing retention of compressible fluid near the pressure-receiving surface of the pressure sensor in the pressure inlet.

SOLUTION: In the pressure sensor 21B whose body 23 is disposed in a pressure inlet channel 22A branching in a T-shaped form upward from the main flow channel 12 through which a pressure-measured fluid flows, the pressure inlet channel 22A has an inclined plane 28 to widen the opening in the fluid inlet side on the wall in the downstream side of the fluid flow.

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