| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid-state imaging device which can suppress the generation of smears and generation of output unevenness, at the same time, and has a shunt wiring, and to provide a manufacturing method therefor. SOLUTION: The solid-state imaging device is used which has a photodetection unit 11, a vertical charge transfer unit 12, and light-shielding films 8 and 10 which shield the vertical charge transfer unit 12 from incident light. The vertical charge transfer unit 12 has a transfer channel and transfer electrodes 3 and 5 provided along a vertical column of the photodetection unit 11. The light-shielding film 8 has conductivity and is vertically formed above the corresponding vertical charge transfer unit 12 with an insulating film 7. The light-shielding film 10 is formed below the light-shielding film 8 in a region between the corresponding photodetection unit 11 and vertical charge transfer unit 12 adjacent thereto, while being insulated from the light-shielding film 8 and transfer electrodes 3 and 5. The light-shielding films are formed, to preferably enclose a circumference of the photodetection unit 11. COPYRIGHT: (C)2009,JPO&INPIT
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