发明名称 PROBE CARD ASSEMBLY
摘要 PROBLEM TO BE SOLVED: To provide an assembly which can compensates better not desirable impact due to strong flexure even if temperature changes, as a probe card assembly which fixes a printed circuit board. SOLUTION: The probe card assembly includes a stiffener 1, a printed circuit board 2 disposed in the stiffener 1, and a spider supported by the stiffener 1 and the printed circuit board 2 and including at least one probe to test a wafer 5. The probe card assembly of the printed circuit board 2 is supported in a loosely decoupled manner in the stiffener 1 to prevent transmission of high thermally-induced warping effects. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009004776(A) 申请公布日期 2009.01.08
申请号 JP20080153213 申请日期 2008.06.11
申请人 MICRONAS GMBH 发明人 STIEFVATER GUENTER;HAUSER WOLFGANG
分类号 H01L21/66;G01R1/073;G01R31/28 主分类号 H01L21/66
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