| 摘要 |
PROBLEM TO BE SOLVED: To provide a laminated heater unit which ensures favorable temperature raising performance while ensuring withstand load performance in the lamination direction. SOLUTION: This heater unit 10 comprises a tabular heater member 26 which generates heat when current is fed thereto, a first intermediate member 30 which is provided on one surface of the heater member 26 in close contact therewith and is electrically non-conductive and has 0.3-0.7 times a thermal conductivity of the heater member 26, a thermally conductive member 32 which is provided on the surface of the first intermediate member 30 on the opposite side of the heater member in close contact therewith and has a higher thermal conductivity than the contact surface 36 in contact with a wafer W and the first intermediate member 30, a base member 12 provided on the other surface side of the heater member 26, and a second intermediate member 18 which is provided between the base member 12 and the heater member 26 in close contact with them and is electrically non-conductive and has a thermal conductivity lower than the base member 12. Thereby, withstand load performance in the lamination direction is ensured, and favorable temperature raising performance is ensured. COPYRIGHT: (C)2009,JPO&INPIT
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