| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of removing foreign matter on a sample surface which detects foreign matter on the sample surface and removes the detected foreign matter on the sample surface when having detected the foreign matter, and to provide a charged particle beam apparatus used for this method. SOLUTION: The method of removing foreign matter 160 on the sample 150 surface irradiated with a charged particle beam includes: a step of acquiring charge information on the sample surface; a step of detecting the foreign matter on the sample surface based on the acquired charge information; a step of moving the sample in a horizontal direction; and a step of charging adsorption electrodes 50, 50a, 50b facing and close to the sample surface with a polarity different from a charge polarity of the foreign matter, and thereby electrostatically adsorbing the foreign matter which approaches the adsorption electrodes. COPYRIGHT: (C)2009,JPO&INPIT
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