| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an organic light-emitting element capable of obtaining cleaning effect and good element characteristics by UV ozone treatment with high cleaning effect. SOLUTION: The method of manufacturing the organic light-emitting element with an organic compound layer clamped between upper and lower electrodes includes the steps of: irradiating a substrate, on which the lower electrode and a pixel separating film are formed, with UV light while introducing and exhausting gases including oxygen into atmosphere; forming an organic compound layer on the lower electrode exposed from an opening of the pixel separating film; and forming the upper electrode on the organic compound layer. The step of irradiating the substrate with UV light includes: the first step of UV ozone treatment at pressure (A); and the second step of UV ozone treatment at pressure (B) that is lower than the pressure (A), wherein at least the second step is carried out after the first step. COPYRIGHT: (C)2009,JPO&INPIT
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