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发明名称
ELECTROSTATIC DRIVE MEMS ELEMENT, MANUFACTURING METHOD THEREOF, OPTICAL MEMS ELEMENT, OPTICAL MODULATION ELEMENT, GLV DEVICE, AND LASER DISPLAY
摘要
申请公布号
EP1460035(A4)
申请公布日期
2009.01.07
申请号
EP20020805882
申请日期
2002.12.16
申请人
SONY CORPORATION
发明人
IKEDA, KOICHI
分类号
G02B26/02;B81B3/00;B81C1/00;G02B5/18;G02B26/08;(IPC1-7):B81B3/00
主分类号
G02B26/02
代理机构
代理人
主权项
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