| 摘要 |
An exposure apparatus is equipped with a chamber, a dry-sealed vacuum pump, an evacuation duct and an infrared ray shielding section. The chamber accommodates components constituting the exposure apparatus therein. The dry-sealed vacuum pump evacuates gas in the chamber. The evacuation duct connects the chamber and the dry-sealed vacuum pump. The infrared ray shielding section is formed at least at an inlet part of the evacuation duct in the chamber or in the evacuation duct, and prevents incidence of infrared ray from the dry-sealed vacuum pump into the chamber.
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