发明名称 METHOD FOR THE PRODUCTION OF A PIEZO ACTUATOR
摘要 The invention relates to a method for producing a piezoelectric actuator in which a metallization paste is applied to a sintered piezoelectric stack and a flexible metal electrode is arranged on top of the paste. In a subsequent baking or firing step, a base metallic coating is formed from the metallization paste, whereby the base coating is permanently connected to the piezoelectric stack and to the flexible metal electrode. Alternatively, the metallization paste can be applied to a green body which is subsequently sintered so that a first layer of a base metallic coating is formed in the sintering step. A metallization paste is applied to the first layer in a similar manner and a flexible metal electrode is arranged thereon, whereby the metal electrode becomes fixed during a second baking step.
申请公布号 EP2011170(A1) 申请公布日期 2009.01.07
申请号 EP20070728213 申请日期 2007.04.18
申请人 ROBERT BOSCH GMBH 发明人 HOHMANN, EUGEN;HENNECK, STEFAN;FERGEN, IMMANUEL
分类号 H01L41/273;H01L41/293 主分类号 H01L41/273
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