Method for manufacture of a physical quantity detector

摘要

In the manufacture of a physical quantity detector, such as a pressure sensor and a load sensor, comprising a cylindrical part (2) of which one end is closed with a strain generating part (3) and a sensor part (4) formed on the strain generating part, the cylindrical part mentioned above is produced by melting an alloying material having a composition capable of yielding an amorphous alloy, injecting the resultant molten alloy into a metal mold (10, 10a), and cooling the molten alloy in the metal mold to confer amorphousness on the alloy. The metal mold is composed of a split mold having at least two split parts (11, 11a, 12, 12a) for forming a cavity (14) and an insert pin (19) to be inserted into the cavity so as to define the inner configuration of the cylindrical part, or further an insert core (16) to be inserted into the mold so as to form the surface of the cavity corresponding to the surface of the strain generating part. In another embodiment, the cavity is formed so that the parting face of the mold corresponds to the surface of the strain generating part.