METHOD FOR TREATMENT OF SURFACE OF OXIDE GLASS WITH FLUORINATING AGENT

摘要

Disclosed is a novel fluorination treatment method which enables to fluorinate the surface of an oxide glass at low cost and with excellent adhesiveness. Specifically disclosed is a method for treating the surface of an oxide glass, which is characterized by contacting the surface of the oxide glass with a gas of a fluorinating agent or a mixed gas comprising the fluorinating agent diluted with an inert gas. The fluorinating agent is a fluorine alone, or a fluorine compound capable of cleaving the binding between an oxygen atom and a metal atom in the skeleton of the oxide glass to form a binding between a fluorine atom and the metal atom.The concentration of hydrogen fluoride on the surface of the oxide glass with which the fluorinating agent contacts is controlled to 1 mol% or less.