METHOD AND APPARATUS FOR CONTROLLING FILM DEPOSITION
摘要
<p>The disclosure relates to a method for depositing films on a substrate which may form part of an LED or other types of display. In one embodiment, the disclosure relates to an apparatus for depositing ink on a substrate. The apparatus includes a chamber for receiving ink; a discharge nozzle having an inlet port and an outlet port, the discharge nozzle receiving a quantity of ink from the chamber at the inlet port and dispensing the quantity of ink from the outlet port; and a dispenser for metering the quantity of ink from the chamber to the inlet port of the discharge nozzle; wherein the chamber receives ink in liquid form having a plurality of suspended particles and the quantity of ink is pulsatingly metered from the chamber to the discharge nozzle; and the discharge nozzle evaporates the carrier liquid and deposits the solid particles on the substrate.</p>
申请公布号
WO2008157410(A1)
申请公布日期
2008.12.24
申请号
WO2008US66991
申请日期
2008.06.13
申请人
MASSACHUSETTS INSTITUTE OF TECHNOLOGY;BULOVIC, VLADIMIR;CHEN, JIANGLONG;MADIGAN, CONOR FRANCIS;SCHMIDT, MARTIN A.
发明人
BULOVIC, VLADIMIR;CHEN, JIANGLONG;MADIGAN, CONOR FRANCIS;SCHMIDT, MARTIN A.