MIKROELEKTROMECHANISCHE HOCHFREQUENZ-SYSTEME UND VERFAHREN ZUR HERSTELLUNG SOLCHER SYSTEME

摘要

An RF MEMS device comprising one or more free-standing thin films configured for motion in response to actuation or stimulation, the one or more thin films comprising an alloy of aluminum and magnesium, and optionally one or more further materials. The resultant thin film has improved hardness and reduced creep relative to conventional thin films.