| 摘要 |
<p>The filter (7) has a cooling medium supply part connected with an inlet pipe and conveying a cooling medium i.e. gaseous medium, into a hollow cylindrical channel through the inlet pipe and a discharge pipe of the channel. The filter is formed as a plate and is made of a homogeneous material permeable for UV-radiation and absorbing the UV-radiation. The channel partially consists of a transparent quartz glass.</p> |
