A system and method of operation for a piezoelectric transducer is described which utilizes a mesa structure (12,62) interposed between a piezoelectric material element (22) and a chamber diaphragm (10). The system can be used as a sensor where a net motion to the diaphragm causes a net charge equal to the sum of the charges on each piezoelectric diaphragm. Alternatively, the system can be used as an actuator wherein an applied voltage causes movement of the piezoelectric transducer and the chamber diaphragm. <IMAGE>
申请公布号
DE60324654(D1)
申请公布日期
2008.12.24
申请号
DE2003624654
申请日期
2003.12.12
申请人
XEROX CORP.
发明人
BUHLER, STEPHEN A.;LITTAU, KARL A.;FITCH, JOHN S.;ANDREWS, JOHN R.;BURKE, CATHIE J.;NYSTROM, PETER J.;SCHMACHTENBERG, RICHARD III