发明名称 METHOD FOR IMPROVING SURFACE ROUGHNESS DURING ELECTRO-POLISHING
摘要 A surface is electropolished using a stream of electrolyte. A nozzle is used to apply the stream of electrolyte to the surface. The nozzle has an insulator wall and a partial electrode. The insulator wall and the partial electrode form a flow channel for the stream of electrolyte. The stream of electrolyte contacts the insulator wall and the partial electrode when the stream of electrolyte flows through the flow channel formed by the insulator wall and the partial electrode. The insulator wall is less electrically conductive than the partial electrode. A power supply is connected to the partial electrode. The power supply is configured to apply a charge to the stream of electrolyte through the partial electrode when the stream of electrolyte flows through the flow channel formed by the insulator wall and the partial electrode.
申请公布号 WO2006110864(A3) 申请公布日期 2008.09.25
申请号 WO2006US13804 申请日期 2006.04.12
申请人 ACM RESEARCH, INC.;WANG, HUI;HO, FREDRICK;WANG, JIAN 发明人 WANG, HUI;HO, FREDRICK;WANG, JIAN
分类号 C25D3/02 主分类号 C25D3/02
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