发明名称 WIRE SAW
摘要 PROBLEM TO BE SOLVED: To prevent damage to a supporting shaft and a core material of a roller by providing, between the supporting shaft and the core material of the roller, a sleeve formed by a material having lower hardness and higher toughness than those of the core material of the roller and the supporting shaft. SOLUTION: In this wire saw, the roller 3 for driving a wire is attachably/detachably fixed to the supporting shaft 12. The sleeve 23 formed by the material having lower hardness and higher toughness than those of the core material 20 of the roller 3 and the supporting shaft 12 is provided between the supporting shaft 12 and the core material 20. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008221383(A) 申请公布日期 2008.09.25
申请号 JP20070061659 申请日期 2007.03.12
申请人 YASUNAGA CORP;YASUNAGA WIRE SAW SYSTEMS CO LTD 发明人 SHINOHARA TAKEHIRO
分类号 B24B27/06;B28D5/04;H01L21/304 主分类号 B24B27/06
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