| 摘要 |
PROBLEM TO BE SOLVED: To highly accurately perform visual inspection and rotational deflection inspection on objects to be inspected by an apparatus constitution by using the same one-dimensional imaging means, reduce cost, and make a compact inspection apparatus realizable. SOLUTION: In a method for inspecting objects to be inspected by inputting surface images of the objects to be inspected, a one-dimensional imaging means 5 is first moved to a prescribed position substantially in parallel with linear reflected light, to input images of at least one full circle of an object to be inspected 3 or more. By processing inputted images for visual inspection, visual inspection is performed on the object to be inspected. Then the one-dimensional imaging means 5 is moved to a prescribed position, at an angle with respect to the center axis of the object to be inspected 3 to input images of at least one full circle of the object to be inspected; on the basis of inputted images for the detection of eccentricity and rotational deflections, the eccentricity and rotational deflections of the object to be inspected, when rotating, are computed to perform eccentricity and rotational deflections inspection; and visual inspection and eccentricity and rotational deflection inspection are performed sequentially on the object to be inspected. COPYRIGHT: (C)2008,JPO&INPIT
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